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Integration of carbon nanotubes for advanced interconnects
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Authors
Chiodarelli, Nicolo
;
Esconjauregui, Santiago Cruz
;
Romo Negreira, Ainhoa
;
Cott, Daire
;
Ek Weis, Johan
;
Richard, Olivier
;
Whelan, Caroline
;
Hantschel, Thomas
;
Groeseneken, Guido
;
De Gendt, Stefan
;
Vereecken, Philippe
Conference
E-MRS Spring Meeting Symposium J: Beyond Silicon Technology: Materials and Devices for Post -Si CMOS
Title
Integration of carbon nanotubes for advanced interconnects
Publication type
Meeting abstract
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