Authors

Chowdhury, Mohammad Kamruzzaman; Vissouvanadin Soubaretty, Bertrand; Bargallo Gonzalez, Mireia; Bhouri, Nada; Verheyen, Peter; Hikavyy, Andriy; Richard, Olivier; Geypen, Jef; Bender, Hugo; Loo, Roger; Claeys, Cor; Simoen, Eddy; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.G.; Lu, J.P.; Weijtmans, J.W.; Wise, R.

Conference

Gettering and Defect Engineering in Semiconductor Technology XII

Title

Influence of the highly-doped drain implantation and the window size on defect creation in p/n Si1-xGex source/drain junctions

Publication type

Proceedings paper

Embargo date

9999-12-31