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Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI

dc.contributor.authorClaes, Gert
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorDu Bois, Bert
dc.contributor.authorVan Barel, Greg
dc.contributor.authorStoffels, Steve
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorNguyen, V.
dc.contributor.authorHentz, S.
dc.contributor.authorRobert, P.
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T06:33:14Z
dc.date.available2021-10-17T06:33:14Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13529
dc.sourceIIOimport
dc.titleProcessing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
dc.typeProceedings paper
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorStoffels, Steve
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage831
dc.source.endpage834
dc.source.conferenceEurosensors XXII
dc.source.conferencedate7/09/2008
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - open access


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