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Defect engineering aspects of advanced Ge process modules

dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.authorOpsomer, Karl
dc.contributor.authorBrunco, David
dc.contributor.authorMeuris, Marc
dc.date.accessioned2021-10-17T06:34:07Z
dc.date.available2021-10-17T06:34:07Z
dc.date.issued2008
dc.identifier.issn0921-5107
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13536
dc.sourceIIOimport
dc.titleDefect engineering aspects of advanced Ge process modules
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorMeuris, Marc
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage49
dc.source.endpage55
dc.source.journalMaterials Science and Engineering B
dc.source.volume154-155
imec.availabilityPublished - open access


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