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Defect engineering aspects of advanced Ge process modules
Publication:
Defect engineering aspects of advanced Ge process modules
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claeys, Cor
;
Simoen, Eddy
;
Opsomer, Karl
;
Brunco, David
;
Meuris, Marc
Journal
Materials Science and Engineering B
Abstract
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2002
since deposited on 2021-10-17
Acq. date: 2026-01-24
Citations
Statistics
Views
2002
since deposited on 2021-10-17
Acq. date: 2026-01-24
Citations