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Defect engineering aspects of advanced Ge process modules
Publication:
Defect engineering aspects of advanced Ge process modules
Date
2008
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claeys, Cor
;
Simoen, Eddy
;
Opsomer, Karl
;
Brunco, David
;
Meuris, Marc
Journal
Materials Science and Engineering B
Abstract
Description
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Views
2002
since deposited on 2021-10-17
2
last month
Acq. date: 2025-12-08
Citations
Metrics
Views
2002
since deposited on 2021-10-17
2
last month
Acq. date: 2025-12-08
Citations