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Impact strain engineering on gate stack quality and reliability

dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.authorPut, Sofie
dc.contributor.authorGiusi, G.
dc.contributor.authorCrupi, F.
dc.date.accessioned2021-10-17T06:34:15Z
dc.date.available2021-10-17T06:34:15Z
dc.date.issued2008
dc.identifier.issn0038-1101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13537
dc.sourceIIOimport
dc.titleImpact strain engineering on gate stack quality and reliability
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1115
dc.source.endpage1126
dc.source.journalSolid-State Electronics
dc.source.issue8
dc.source.volume52
imec.availabilityPublished - open access


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