Impact strain engineering on gate stack quality and reliability

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Authors

Claeys, Cor; Simoen, Eddy; Put, Sofie; Giusi, G.; Crupi, F.

ISSN

0038-1101

Issue

8

Journal

Solid-State Electronics

Volume

52

Title

Impact strain engineering on gate stack quality and reliability

Publication type

Journal article

Embargo date

9999-12-31

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