Impact strain engineering on gate stack quality and reliability

dc.contributor.author	Claeys, Cor
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Put, Sofie
dc.contributor.author	Giusi, G.
dc.contributor.author	Crupi, F.
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-10-17T06:34:15Z
dc.date.available	2021-10-17T06:34:15Z
dc.date.embargo	9999-12-31
dc.date.issued	2008
dc.identifier.issn	0038-1101
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/13537
dc.source.beginpage	1115
dc.source.endpage	1126
dc.source.issue	8
dc.source.journal	Solid-State Electronics
dc.source.volume	52
dc.title	Impact strain engineering on gate stack quality and reliability
dc.type	Journal article
dspace.entity.type	Publication
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