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On the activation mechanisms of sub-melt laser anneals

dc.contributor.authorClarysse, Trudo
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorGoossens, Jozefien
dc.contributor.authorMoussa, Alain
dc.contributor.authorRosseel, Erik
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorPetersen, D.H.
dc.contributor.authorLin, R.
dc.contributor.authorNielsen, P.F.
dc.contributor.authorHansen, O.
dc.contributor.authorDefranoux, C.
dc.contributor.authorVertikov, A.
dc.contributor.authorGostein, M.
dc.contributor.authorBennett, N.S.
dc.contributor.authorCowern, N.E.B.
dc.contributor.authorFaifer, V.N.
dc.date.accessioned2021-10-17T06:34:26Z
dc.date.available2021-10-17T06:34:26Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13538
dc.sourceIIOimport
dc.titleOn the activation mechanisms of sub-melt laser anneals
dc.typeMeeting abstract
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceE-MRS Sprng Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices
dc.source.conferencedate26/05/2008
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - open access


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