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On the analysis of the activation mechanisms of sub-melt laser anneals

dc.contributor.authorClarysse, Trudo
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorGoossens, Jozefien
dc.contributor.authorMoussa, Alain
dc.contributor.authorRosseel, Erik
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorPetersen, Dirch
dc.contributor.authorLin, Rong
dc.contributor.authorNielsen, P.F.
dc.contributor.authorHansen, Ole
dc.contributor.authorMerklin, G.
dc.contributor.authorBennett, N.S.
dc.contributor.authorCowern, N.E.B.
dc.date.accessioned2021-10-17T06:34:36Z
dc.date.available2021-10-17T06:34:36Z
dc.date.issued2008
dc.identifier.issn0921-5107
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13539
dc.sourceIIOimport
dc.titleOn the analysis of the activation mechanisms of sub-melt laser anneals
dc.typeJournal article
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.source.peerreviewyes
dc.source.beginpage24
dc.source.endpage30
dc.source.journalMaterials Science and Engineering B
dc.source.volume154-155
imec.availabilityPublished - imec


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