On the analysis of the activation mechanisms of sub-melt laser anneals

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Authors
Clarysse, Trudo; Bogdanowicz, Janusz; Goossens, Jozefien; Moussa, Alain; Rosseel, Erik; Vandervorst, Wilfried; Petersen, Dirch; Lin, Rong; Nielsen, P.F.; Hansen, Ole; Merklin, G.; Bennett, N.S.; Cowern, N.E.B.
ISSN
0921-5107
Journal
Materials Science and Engineering B
Volume
154-155
Title
On the analysis of the activation mechanisms of sub-melt laser anneals
Publication type
Journal article
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