Publication:
On the analysis of the activation mechanisms of sub-melt laser anneals
Date
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Bogdanowicz, Janusz | |
| dc.contributor.author | Goossens, Jozefien | |
| dc.contributor.author | Moussa, Alain | |
| dc.contributor.author | Rosseel, Erik | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Petersen, Dirch | |
| dc.contributor.author | Lin, Rong | |
| dc.contributor.author | Nielsen, P.F. | |
| dc.contributor.author | Hansen, Ole | |
| dc.contributor.author | Merklin, G. | |
| dc.contributor.author | Bennett, N.S. | |
| dc.contributor.author | Cowern, N.E.B. | |
| dc.contributor.imecauthor | Bogdanowicz, Janusz | |
| dc.contributor.imecauthor | Moussa, Alain | |
| dc.contributor.imecauthor | Rosseel, Erik | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
| dc.date.accessioned | 2021-10-17T06:34:36Z | |
| dc.date.available | 2021-10-17T06:34:36Z | |
| dc.date.issued | 2008 | |
| dc.identifier.issn | 0921-5107 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13539 | |
| dc.source.beginpage | 24 | |
| dc.source.endpage | 30 | |
| dc.source.journal | Materials Science and Engineering B | |
| dc.source.volume | 154-155 | |
| dc.title | On the analysis of the activation mechanisms of sub-melt laser anneals | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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