Authors

Clarysse, Trudo; Moussa, Alain; Zangerle, Thomas; Schaus, Frederic; Vandervorst, Wilfried; Faifer, V.N.; Current, M.I.

ISSN

1071-1023

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

26

Title

Insights in junction photovoltage based sheet resistance measurements for advanced complementary metal-oxide semiconductor

Publication type

Journal article

Embargo date

9999-12-31