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Insights in junction photovoltage based sheet resistance measurements for advanced complementary metal-oxide semiconductor

dc.contributor.authorClarysse, Trudo
dc.contributor.authorMoussa, Alain
dc.contributor.authorZangerle, Thomas
dc.contributor.authorSchaus, Frederic
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorFaifer, V.N.
dc.contributor.authorCurrent, M.I.
dc.date.accessioned2021-10-17T06:35:05Z
dc.date.available2021-10-17T06:35:05Z
dc.date.issued2008
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13542
dc.sourceIIOimport
dc.titleInsights in junction photovoltage based sheet resistance measurements for advanced complementary metal-oxide semiconductor
dc.typeJournal article
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage420
dc.source.endpage424
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume26
imec.availabilityPublished - open access


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