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Checking design conformance and optimizing manufacturability using automated double-patterning decomposition

dc.contributor.authorCork, Christopher M.
dc.contributor.authorWard, Brian
dc.contributor.authorBarnes, Levi D.
dc.contributor.authorPainter, Ben
dc.contributor.authorLucas, Kevin
dc.contributor.authorLuk-Pat, Gerry
dc.contributor.authorWiaux, Vincent
dc.contributor.authorVerhaegen, Staf
dc.contributor.authorMaenhoudt, Mireille
dc.date.accessioned2021-10-17T06:37:12Z
dc.date.available2021-10-17T06:37:12Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13556
dc.sourceIIOimport
dc.titleChecking design conformance and optimizing manufacturability using automated double-patterning decomposition
dc.typeProceedings paper
dc.contributor.imecauthorWiaux, Vincent
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage69251Q
dc.source.conferenceDesign for Manufacturability through Design-Process Integration II
dc.source.conferencedate24/02/2008
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; vol. 6925


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