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Integration of resistive switching NiO in small via structures from localized oxidation in nickel metallic layer
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Authors
Courtade, Lorene
;
Turquat, Ch.
;
Lisoni, Judit
;
Goux, Ludovic
;
Wouters, Dirk
;
Deleruyelle, C.
;
Muller, Ch.
Conference
38th European Solid-State Device Research Conference - ESSDERC
Title
Integration of resistive switching NiO in small via structures from localized oxidation in nickel metallic layer
Publication type
Proceedings paper
Embargo date
9999-12-31
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