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Influence of the substrate on the lifetime of capacitive RF MEMS switches

dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSoussan, Philippe
dc.contributor.authorEkkels, Phillip
dc.contributor.authorMuller, Philippe
dc.contributor.authorNolmans, Philip
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.contributor.authorPuers, Bob
dc.contributor.authorMarchand, Laurent
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-17T06:40:50Z
dc.date.available2021-10-17T06:40:50Z
dc.date.issued2008-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13580
dc.sourceIIOimport
dc.titleInfluence of the substrate on the lifetime of capacitive RF MEMS switches
dc.typeProceedings paper
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorMuller, Philippe
dc.contributor.imecauthorNolmans, Philip
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage172
dc.source.endpage175
dc.source.conference21st IEEE International Conference on Micro Electro Mechnical Systems - MEMS
dc.source.conferencedate13/01/2008
dc.source.conferencelocationTucson, AZ USA
imec.availabilityPublished - open access


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