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New insights into charging in capacitive RF MEMS switches

dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSoussan, Philippe
dc.contributor.authorNolmans, Philip
dc.contributor.authorEkkels, Phillip
dc.contributor.authorMuller, Philippe
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorPuers, Bob
dc.contributor.authorMarchand, Laurent
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-17T06:41:01Z
dc.date.available2021-10-17T06:41:01Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13581
dc.sourceIIOimport
dc.titleNew insights into charging in capacitive RF MEMS switches
dc.typeProceedings paper
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorNolmans, Philip
dc.contributor.imecauthorMuller, Philippe
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage496
dc.source.endpage505
dc.source.conferenceIEEE International Reliability Physics Symposium Proceedings - IRPS
dc.source.conferencedate27/04/2008
dc.source.conferencelocationPhoenix, AZ USA
imec.availabilityPublished - open access


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