Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Effect of quartz window temperature on plasma composition during STI etch
View/
open
17395.pdf (983.2Kb)
Metadata
Show full item record
Authors
Danilkin, Evgeny
;
Shamiryan, Denis
;
Baklanov, Mikhaïl
;
Milenin, Alexey
;
Boullart, Werner
;
Krasnikov, G.
;
Gutschin, O
;
Mochalov, A
Conference
Micro- and Nanoelectronics 2007
Title
Effect of quartz window temperature on plasma composition during STI etch
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login