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Extended defects created by hydrogen implantation in germanium: the influence of the substrate temperature

dc.contributor.authorDavid, M.L.
dc.contributor.authorPailloux, F.
dc.contributor.authorBabonneau, D.
dc.contributor.authorDrouet, M.
dc.contributor.authorBarbot, J.F.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-17T06:42:08Z
dc.date.available2021-10-17T06:42:08Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13588
dc.sourceIIOimport
dc.titleExtended defects created by hydrogen implantation in germanium: the influence of the substrate temperature
dc.typeOral presentation
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conferenceInternational Conference on Extended Defects in Semiconductors - EDS
dc.source.conferencedate14/09/2008
dc.source.conferencelocationPoitiers France
imec.availabilityPublished - imec


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