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Impact of finite laser bandwidth on the critical dimension of L/S structures

dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorLalovic, Ivan
dc.contributor.authorTrintchouk, Fedor
dc.date.accessioned2021-10-17T06:43:03Z
dc.date.available2021-10-17T06:43:03Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13594
dc.sourceIIOimport
dc.titleImpact of finite laser bandwidth on the critical dimension of L/S structures
dc.typeJournal article
dc.contributor.imecauthorDe Bisschop, Peter
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage33001
dc.source.journalJournal of Micro/Nanolithography, MEMS, and MOEMS
dc.source.issue3
dc.source.volume7
imec.availabilityPublished - open access


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