Impact of finite laser bandwidth on the critical dimension of L/S structures
dc.contributor.author | De Bisschop, Peter | |
dc.contributor.author | Lalovic, Ivan | |
dc.contributor.author | Trintchouk, Fedor | |
dc.date.accessioned | 2021-10-17T06:43:03Z | |
dc.date.available | 2021-10-17T06:43:03Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13594 | |
dc.source | IIOimport | |
dc.title | Impact of finite laser bandwidth on the critical dimension of L/S structures | |
dc.type | Journal article | |
dc.contributor.imecauthor | De Bisschop, Peter | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 33001 | |
dc.source.journal | Journal of Micro/Nanolithography, MEMS, and MOEMS | |
dc.source.issue | 3 | |
dc.source.volume | 7 | |
imec.availability | Published - open access |