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Long-term reliability measurements on MEMS using a laser-Doppler vibrometer

dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-17T06:43:30Z
dc.date.available2021-10-17T06:43:30Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13597
dc.sourceIIOimport
dc.titleLong-term reliability measurements on MEMS using a laser-Doppler vibrometer
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.conference9th International Symposium on Laser Metrology
dc.source.conferencedate30/06/2008
dc.source.conferencelocationSingapore
imec.availabilityPublished - imec


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