Stabilisation and control of improved nano-ceria dispersions for STI CMP slurries

Thumbnail
Metadata
Show full item record
Authors
De Messemaeker, Jo; Kellens, Kristof; Van Genechten, Dirk; Put, Stijn; Nelis, Daniel; Strauven, Yvan; Ong, Patrick; Devriendt, Katia
Conference
International Conference on Planarization / CMP Technology - ICPT
Title
Stabilisation and control of improved nano-ceria dispersions for STI CMP slurries
Publication type
Proceedings paper
Collections