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Dielectric reliability of 50nm 1/2 pitch structures in Aurora® LK

dc.contributor.authorDemuynck, Steven
dc.contributor.authorKim, Hongun
dc.contributor.authorHuffman, Craig
dc.contributor.authorDarnon, Maxime
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVersluijs, Janko
dc.contributor.authorClaes, Martine
dc.contributor.authorVereecke, Guy
dc.contributor.authorVolders, Henny
dc.contributor.authorHeylen, Nancy
dc.contributor.authorKellens, Kristof
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-17T06:53:09Z
dc.date.available2021-10-17T06:53:09Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13654
dc.sourceIIOimport
dc.titleDielectric reliability of 50nm 1/2 pitch structures in Aurora® LK
dc.typeProceedings paper
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecStruyf, Herbert::0000-0002-6782-5424
dc.source.peerreviewyes
dc.source.conference40th International Confernece on Solid STate Devices and Materials
dc.source.conferencedate22/09/2008
dc.source.conferencelocationTsukuba Japan
imec.availabilityPublished - imec


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