Authors

Mouche, M.J.; Caymax, Matty; Bender, Hugo; Storm, Wolfgang; Vandervorst, Wilfried

Conference

Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

Title

The importance of H-passivation for low-temperature APCVD silicon epitaxy

Publication type

Proceedings paper

Embargo date

9999-12-31