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Photon induced low temperature etching of copper and/or formation of copper nanowires

dc.contributor.authorDictus, Dries
dc.contributor.authorShamiryan, Denis
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorBoullart, Werner
dc.contributor.authorBaklanov, Michail
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVinckier, Chris
dc.contributor.authorVanhaelemeersch, Serge
dc.date.accessioned2021-10-17T06:54:55Z
dc.date.available2021-10-17T06:54:55Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13664
dc.sourceIIOimport
dc.titlePhoton induced low temperature etching of copper and/or formation of copper nanowires
dc.typeOral presentation
dc.contributor.imecauthorDictus, Dries
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.orcidimecDictus, Dries::0000-0002-7896-1747
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewno
dc.source.conference17th Workshop Materials for Advanced Metallization
dc.source.conferencedate3/03/2008
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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