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Nickel-plated thermal actuator with electrostatic latch

dc.contributor.authorDriesen, Maarten
dc.contributor.authorCeyssens, Frederik
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorPuers, Robert
dc.date.accessioned2021-10-17T06:56:31Z
dc.date.available2021-10-17T06:56:31Z
dc.date.issued2008-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13673
dc.sourceIIOimport
dc.titleNickel-plated thermal actuator with electrostatic latch
dc.typeProceedings paper
dc.contributor.imecauthorCeyssens, Frederik
dc.contributor.imecauthorDe Coster, Jeroen
dc.source.peerreviewyes
dc.source.beginpage904
dc.source.endpage907
dc.source.conferenceEurosensors XXII
dc.source.conferencedate7/09/2008
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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