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Improved fin width scaling in fully-depleted FinFETs

dc.contributor.authorDuffy, Ray
dc.contributor.authorVan Dal, Mark
dc.contributor.authorPawlak, Bartek
dc.contributor.authorCollaert, Nadine
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorRooyackers, Rita
dc.contributor.authorKaiser, M.
dc.contributor.authorWeemaes, R. G. R.
dc.contributor.authorJurczak, Gosia
dc.contributor.authorLander, Rob
dc.date.accessioned2021-10-17T06:57:53Z
dc.date.available2021-10-17T06:57:53Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13680
dc.sourceIIOimport
dc.titleImproved fin width scaling in fully-depleted FinFETs
dc.typeProceedings paper
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage334
dc.source.endpage337
dc.source.conference38th European Sooid-State Device Research Conference - ESSDERC
dc.source.conferencedate16/09/2008
dc.source.conferencelocationEdinburgh UK
imec.availabilityPublished - open access


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