dc.contributor.author | Eslava Fernandez, Salvador | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Iacopi, Francesca | |
dc.contributor.author | Urrutia, Jone | |
dc.contributor.author | Busawon, Abheesh N. | |
dc.contributor.author | Kirschhock, Christine E. A. | |
dc.contributor.author | Maex, Karen | |
dc.contributor.author | Martens, Johan A. | |
dc.date.accessioned | 2021-10-17T07:01:23Z | |
dc.date.available | 2021-10-17T07:01:23Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13699 | |
dc.source | IIOimport | |
dc.title | Zeolite-like films for low-k applications | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Maex, Karen | |
dc.source.peerreview | no | |
dc.source.conference | MRS Spring Meeting Symposium N: Materials and Processes for Advanced Interconnects for Microelectronics | |
dc.source.conferencedate | 24/03/2008 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |