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Zeolite-like films for low-k applications

dc.contributor.authorEslava Fernandez, Salvador
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorIacopi, Francesca
dc.contributor.authorUrrutia, Jone
dc.contributor.authorBusawon, Abheesh N.
dc.contributor.authorKirschhock, Christine E. A.
dc.contributor.authorMaex, Karen
dc.contributor.authorMartens, Johan A.
dc.date.accessioned2021-10-17T07:01:23Z
dc.date.available2021-10-17T07:01:23Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13699
dc.sourceIIOimport
dc.titleZeolite-like films for low-k applications
dc.typeMeeting abstract
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symposium N: Materials and Processes for Advanced Interconnects for Microelectronics
dc.source.conferencedate24/03/2008
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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