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Evidence of large voids in pure-silica-zeolite low-k dielectrics by spin-on of nanoparticle suspensions

dc.contributor.authorEslava Fernandez, Salvador
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorNeimark, Alex. V.
dc.contributor.authorIacopi, Francesca
dc.contributor.authorKirschhock, Christine E. A.
dc.contributor.authorMaex, Karen
dc.contributor.authorMartens, Johan A.
dc.date.accessioned2021-10-17T07:01:48Z
dc.date.available2021-10-17T07:01:48Z
dc.date.issued2008
dc.identifier.issn0935-9648
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13701
dc.sourceIIOimport
dc.titleEvidence of large voids in pure-silica-zeolite low-k dielectrics by spin-on of nanoparticle suspensions
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewyes
dc.source.beginpage3110
dc.source.endpage3116
dc.source.journalAdvanced Materials
dc.source.issue16
dc.source.volume20
imec.availabilityPublished - imec


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