Publication:
Evidence of large voids in pure-silica-zeolite low-k dielectrics by spin-on of nanoparticle suspensions
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1898 since deposited on 2021-10-17
Acq. date: 2025-12-11
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Views
1898 since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations