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Evidence of large voids in pure-silica-zeolite low-k dielectrics by spin-on of nanoparticle suspensions
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Authors
Eslava Fernandez, Salvador
;
Baklanov, Mikhaïl
;
Neimark, Alex. V.
;
Iacopi, Francesca
;
Kirschhock, Christine E. A.
;
Maex, Karen
;
Martens, Johan A.
ISSN
0935-9648
Issue
16
Journal
Advanced Materials
Volume
20
Title
Evidence of large voids in pure-silica-zeolite low-k dielectrics by spin-on of nanoparticle suspensions
Publication type
Journal article
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