Publication:
Evidence of large voids in pure-silica-zeolite low-k dielectrics by spin-on of nanoparticle suspensions
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1900 since deposited on 2021-10-17
2last month
Acq. date: 2026-01-06
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Metrics
Views
1900 since deposited on 2021-10-17
2last month
Acq. date: 2026-01-06
Citations