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Ultraviolet-assisted curing of organosilicate glass low-k dielectric by excimer lamps

dc.contributor.authorEslava Fernandez, Salvador
dc.contributor.authorIacopi, Francesca
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorKirschhock, Christine E. A.
dc.contributor.authorMaex, Karen
dc.contributor.authorMartens, Johan A.
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-17T07:02:37Z
dc.date.available2021-10-17T07:02:37Z
dc.date.issued2008
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13705
dc.sourceIIOimport
dc.titleUltraviolet-assisted curing of organosilicate glass low-k dielectric by excimer lamps
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageG231
dc.source.endpageG236
dc.source.journalJournal of the Electrochemical Society
dc.source.issue11
dc.source.volume155
imec.availabilityPublished - open access


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