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Ultraviolet-assisted curing of organosilicate glass low-k dielectric by excimer lamps
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Authors
Eslava Fernandez, Salvador
;
Iacopi, Francesca
;
Urbanowicz, Adam
;
Kirschhock, Christine E. A.
;
Maex, Karen
;
Martens, Johan A.
;
Baklanov, Mikhaïl
ISSN
0013-4651
Issue
11
Journal
Journal of the Electrochemical Society
Volume
155
Title
Ultraviolet-assisted curing of organosilicate glass low-k dielectric by excimer lamps
Publication type
Journal article
Embargo date
9999-12-31
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