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Ultraviolet-assisted curing of organosilicate glass low-k dielectric by excimer lamps
Publication:
Ultraviolet-assisted curing of organosilicate glass low-k dielectric by excimer lamps
Date
2008
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eslava Fernandez, Salvador
;
Iacopi, Francesca
;
Urbanowicz, Adam
;
Kirschhock, Christine E. A.
;
Maex, Karen
;
Martens, Johan A.
;
Baklanov, Mikhaïl
Journal
Journal of the Electrochemical Society
Abstract
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1914
since deposited on 2021-10-17
Acq. date: 2025-10-24
Citations
Metrics
Views
1914
since deposited on 2021-10-17
Acq. date: 2025-10-24
Citations