Zeolite-inspired low-k dielectrics: overcoming limitations of zeolite films

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Authors

Eslava Fernandez, Salvador; Urrita, Jone; Busawon, Abheesh; Baklanov, Mikhaïl; Iacopi, Francesca; Aldea, Steliana; Maex, Karen; Martens, Johan; Kirschhock, Christine

Issue

51

Journal

Journal of American Chemical Society

Volume

130

Title

Zeolite-inspired low-k dielectrics: overcoming limitations of zeolite films

Publication type

Journal article

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