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Zeolite-inspired low-k dielectrics: overcoming limitations of zeolite films

dc.contributor.authorEslava Fernandez, Salvador
dc.contributor.authorUrrita, Jone
dc.contributor.authorBusawon, Abheesh
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorIacopi, Francesca
dc.contributor.authorAldea, Steliana
dc.contributor.authorMaex, Karen
dc.contributor.authorMartens, Johan
dc.contributor.authorKirschhock, Christine
dc.date.accessioned2021-10-17T07:02:49Z
dc.date.available2021-10-17T07:02:49Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13706
dc.sourceIIOimport
dc.titleZeolite-inspired low-k dielectrics: overcoming limitations of zeolite films
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage17528
dc.source.endpage17536
dc.source.journalJournal of American Chemical Society
dc.source.issue51
dc.source.volume130
imec.availabilityPublished - imec


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