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Ultra-shallow junctions formed by C co-implantation with spkie plus sub-melt laser annealing

dc.contributor.authorFelch, S.B.
dc.contributor.authorCollart, E.
dc.contributor.authorParihar, V.
dc.contributor.authorThirupapulyur, S.
dc.contributor.authorSchreutelkamp, R.
dc.contributor.authorPawlak, Bartek
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorSeveri, Simone
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNoda, Taiji
dc.date.accessioned2021-10-17T07:04:57Z
dc.date.available2021-10-17T07:04:57Z
dc.date.issued2008
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13717
dc.sourceIIOimport
dc.titleUltra-shallow junctions formed by C co-implantation with spkie plus sub-melt laser annealing
dc.typeJournal article
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage281
dc.source.endpage285
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume26
imec.availabilityPublished - open access


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