Metal gate thickness optimization for MuGFET performance improvement

Thumbnail
View/open
Metadata
Show full item record
Authors
Ferain, Isabelle; Collaert, Nadine; O'Sullivan, Barry; Conard, Thierry; Popovici, Mihaela Ioana; Van Elshocht, Sven; Swerts, Johan; Jurczak, Gosia; De Meyer, Kristin
Conference
38th European Solid-State Device Research Conference - ESSDERC
Title
Metal gate thickness optimization for MuGFET performance improvement
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections