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Evaluation of an advanced organic ultra-low-k material

dc.contributor.authorFerchichi, Abdelkarim
dc.contributor.authorTravaly, Youssef
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorVanstreels, Kris
dc.date.accessioned2021-10-17T07:05:56Z
dc.date.available2021-10-17T07:05:56Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13722
dc.sourceIIOimport
dc.titleEvaluation of an advanced organic ultra-low-k material
dc.typeMeeting abstract
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference - AMC
dc.source.conferencedate23/09/2008
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access


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