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MEMS in post-processed standard CMOS

dc.contributor.authorGarcia Bardon, Marie
dc.contributor.authorPereira Neves, Hercules
dc.contributor.authorPuers, Bob
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-17T07:11:28Z
dc.date.available2021-10-17T07:11:28Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13749
dc.sourceIIOimport
dc.titleMEMS in post-processed standard CMOS
dc.typeProceedings paper
dc.contributor.imecauthorGarcia Bardon, Marie
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewno
dc.source.beginpage299
dc.source.endpage302
dc.source.conference19th MicroMechanics Europe Workshop - MME
dc.source.conferencedate28/09/2008
dc.source.conferencelocationAachen Germany
imec.availabilityPublished - imec


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