Show simple item record

Study and estimation of the residual stress in porous silicon layer formed on the surface of a crystalline silicon substrate

dc.contributor.authorGhannam, Moustafa
dc.contributor.authorHassan, Mostafa Medhat
dc.contributor.authorDepauw, Valerie
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorPoortmans, Jef
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-17T07:14:12Z
dc.date.available2021-10-17T07:14:12Z
dc.date.issued2008
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13762
dc.sourceIIOimport
dc.titleStudy and estimation of the residual stress in porous silicon layer formed on the surface of a crystalline silicon substrate
dc.typeJournal article
dc.contributor.imecauthorGhannam, Moustafa
dc.contributor.imecauthorDepauw, Valerie
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecDepauw, Valerie::0000-0003-2045-9698
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage6924
dc.source.endpage6929
dc.source.journalThin Solid Films
dc.source.issue20
dc.source.volume516
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
14759.pdf
Size:
847.6Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record