Authors

Ghannam, Moustafa; Hassan, Mostafa Medhat; Depauw, Valerie; Beaucarne, Guy; Poortmans, Jef; Mertens, Robert

ISSN

0040-6090

Issue

20

Journal

Thin Solid Films

Volume

516

Title

Study and estimation of the residual stress in porous silicon layer formed on the surface of a crystalline silicon substrate

Publication type

Journal article

Embargo date

9999-12-31