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Study and estimation of the residual stress in porous silicon layer formed on the surface of a crystalline silicon substrate

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1876 since deposited on 2021-10-17
2last month
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Acq. date: 2026-08-07

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1876 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-08-07

Citations