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Study and estimation of the residual stress in porous silicon layer formed on the surface of a crystalline silicon substrate
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Study and estimation of the residual stress in porous silicon layer formed on the surface of a crystalline silicon substrate
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ghannam, Moustafa
;
Hassan, Mostafa Medhat
;
Depauw, Valerie
;
Beaucarne, Guy
;
Poortmans, Jef
;
Mertens, Robert
Journal
Thin Solid Films
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1870
since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations
Metrics
Views
1870
since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations