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Numerical-experimental comparison of low-g and high-g tests on a polysilicon MEMS accelerometer

dc.contributor.authorGhisi, A.
dc.contributor.authorKalicinski, Stanislaw
dc.contributor.authorMariani, S.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorCorigliano, A.
dc.date.accessioned2021-10-17T07:14:37Z
dc.date.available2021-10-17T07:14:37Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13764
dc.sourceIIOimport
dc.titleNumerical-experimental comparison of low-g and high-g tests on a polysilicon MEMS accelerometer
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceEuroSimE: Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems
dc.source.conferencedate20/04/2008
dc.source.conferencelocationFreiburg Germany
imec.availabilityPublished - imec


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