dc.contributor.author | Goethals, Mieke | |
dc.contributor.author | Niroomand, Ardavan | |
dc.contributor.author | Van Roey, Frieda | |
dc.contributor.author | Hermans, Jan | |
dc.contributor.author | Lorusso, Gian | |
dc.contributor.author | Baudemprez, Bart | |
dc.contributor.author | Pollentier, Ivan | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Demuynck, Steven | |
dc.contributor.author | Jonckheere, Rik | |
dc.contributor.author | Ronse, Kurt | |
dc.date.accessioned | 2021-10-17T07:17:52Z | |
dc.date.available | 2021-10-17T07:17:52Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13778 | |
dc.source | IIOimport | |
dc.title | Resist process development for the EUV alpha demo tool at IMEC | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Van Roey, Frieda | |
dc.contributor.imecauthor | Hermans, Jan | |
dc.contributor.imecauthor | Lorusso, Gian | |
dc.contributor.imecauthor | Baudemprez, Bart | |
dc.contributor.imecauthor | Pollentier, Ivan | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Demuynck, Steven | |
dc.contributor.imecauthor | Jonckheere, Rik | |
dc.contributor.imecauthor | Ronse, Kurt | |
dc.contributor.orcidimec | Hermans, Jan::0000-0003-1249-8902 | |
dc.contributor.orcidimec | Pollentier, Ivan::0000-0002-4266-6500 | |
dc.contributor.orcidimec | Jonckheere, Rik::0000-0003-2211-9443 | |
dc.contributor.orcidimec | Ronse, Kurt::0000-0003-0803-4267 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | International Workshop on EUVL | |
dc.source.conferencedate | 10/06/2008 | |
dc.source.conferencelocation | Maui, HI USA | |
imec.availability | Published - open access | |