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Evaluation of piezoresistivity and 1/f noise of polycrystalline SiGe for MEMS sensor applications

dc.contributor.authorGonzalez, Pilar
dc.contributor.authorSeveri, Simone
dc.contributor.authorLenci, Silvia
dc.contributor.authorMerken, Patrick
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-17T07:19:39Z
dc.date.available2021-10-17T07:19:39Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13786
dc.sourceIIOimport
dc.titleEvaluation of piezoresistivity and 1/f noise of polycrystalline SiGe for MEMS sensor applications
dc.typeProceedings paper
dc.contributor.imecauthorGonzalez, Pilar
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorDe Meyer, Kristin
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage881
dc.source.endpage884
dc.source.conferenceEurosensors XXII
dc.source.conferencedate7/09/2008
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - open access


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