Multi-gate devices for the 32-nm node and beyond: advantages and issues

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Authors
Griffoni, Alessio; Simoen, Eddy; Collaert, Nadine; Claeys, Cor; Paccagnella, Alessandro; Meneghesso, Gaudenzio
Conference
17th European Workshop on Heterostructure Technology - HETECH
Title
Multi-gate devices for the 32-nm node and beyond: advantages and issues
Publication type
Proceedings paper
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