Using KLUP for understanding trends in EUV resist performance

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Authors

Gronheid, Roel; Van Roey, Frieda; Van Steenwinckel, David

ISSN

0914-9244

Issue

3

Journal

Journal of Photopolymer Science and Technology

Volume

21

Title

Using KLUP for understanding trends in EUV resist performance

Publication type

Journal article

Embargo date

9999-12-31

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